| 1. | Firstly , considering the molecular pump is small and the elimination of heat condition is bad , this paper presents the structure of the mb , including the material of the rotor and stator , the number of magnetic poles , the stator slot shape of mb , the layout of the magnetic poles , the coins winding and so on 首先综合考虑了分子泵体积小、磁轴承散热条件不好的特点,设计了分子泵磁悬浮轴承的结构,选择了轴承铁芯的材料,设计了磁极的布置、槽的形状、磁极数目和线圈缠绕方式。 |